Title :
Characterization of microbridge gas-flow sensors
Author :
Sinha, Nita ; Abdel-Motaleb, Ibrahim M.
Author_Institution :
Northern Illinois Univ., DeKalb
Abstract :
The electro-thermal characteristics of micro-bridge sensors with different materials and surface textures have been studied. The results show that the sensor response is sensitive to the gas properties, inlet temperature, velocity, and pressure. The sensor sensitivity is found to improve when high thermal conductivity materials and rougher microplate surfaces are used.
Keywords :
gas sensors; sensitivity; thermal conductivity; electro-thermal characteristics; microbridge gas-flow sensors; sensor sensitivity; surface textures; thermal conductivity; Conducting materials; Contacts; Gas detectors; Gold; Rough surfaces; Sensor phenomena and characterization; Surface roughness; Temperature measurement; Temperature sensors; Thermal sensors;
Conference_Titel :
Electro/Information Technology, 2007 IEEE International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-0941-9
Electronic_ISBN :
978-1-4244-0941-9
DOI :
10.1109/EIT.2007.4374531
