DocumentCode
1972020
Title
Characterization of microbridge gas-flow sensors
Author
Sinha, Nita ; Abdel-Motaleb, Ibrahim M.
Author_Institution
Northern Illinois Univ., DeKalb
fYear
2007
fDate
17-20 May 2007
Firstpage
453
Lastpage
458
Abstract
The electro-thermal characteristics of micro-bridge sensors with different materials and surface textures have been studied. The results show that the sensor response is sensitive to the gas properties, inlet temperature, velocity, and pressure. The sensor sensitivity is found to improve when high thermal conductivity materials and rougher microplate surfaces are used.
Keywords
gas sensors; sensitivity; thermal conductivity; electro-thermal characteristics; microbridge gas-flow sensors; sensor sensitivity; surface textures; thermal conductivity; Conducting materials; Contacts; Gas detectors; Gold; Rough surfaces; Sensor phenomena and characterization; Surface roughness; Temperature measurement; Temperature sensors; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electro/Information Technology, 2007 IEEE International Conference on
Conference_Location
Chicago, IL
Print_ISBN
978-1-4244-0941-9
Electronic_ISBN
978-1-4244-0941-9
Type
conf
DOI
10.1109/EIT.2007.4374531
Filename
4374531
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