DocumentCode :
1972101
Title :
Electrical stressing of bilayer insulator HfO2/Al2O3 metal-insulator-insulator-metal (MIIM) diodes
Author :
Klarr, T. ; Austin, D.Z. ; Alimardani, N. ; Conley, J.F.
Author_Institution :
Sch. of EECS, Oregon State Univ., Corvallis, OR, USA
fYear :
2013
fDate :
13-17 Oct. 2013
Firstpage :
15
Lastpage :
18
Abstract :
Bilayer metal/insulator/insulator/metal (MIIM) diodes of HfO2 and Al2O3 using asymmetric metal gates are investigated for their susceptibility to trap charge. Comparing the effects of constant current electrical stressing for varying thicknesses of insulators, the authors have formulated an adaptation of the Fowler-Nordheim derivative method such that an estimate of the charge centroid location can be obtained for bilayer insulators. In this work it has been found the addition of an HfO2 layer into an Al2O3 MIM device leads to increased charge trapping and greater shifts in the I-V characteristic.
Keywords :
MIM devices; alumina; hafnium compounds; high-k dielectric thin films; insulators; optical susceptibility; semiconductor device breakdown; tunnel diodes; Fowler-Nordheim derivative method; HfO2-Al2O3; I-V characteristic; asymmetric metal gates; bilayer insulator; charge centroid location; constant current electrical stressing; metal-insulator-insulator-metal diodes; trap charge susceptibility; Aluminum oxide; Cathodes; Hafnium compounds; Insulators; Tunneling; ALD; atomic layer deposition; electrical stressing; metal/insulator/insulator/metal diodes (MIIM); metal/insulator/metal diode (MIM);
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Integrated Reliability Workshop Final Report (IRW), 2013 IEEE International
Conference_Location :
South Lake Tahoe, CA
ISSN :
1930-8841
Print_ISBN :
978-1-4799-0350-4
Type :
conf
DOI :
10.1109/IIRW.2013.6804143
Filename :
6804143
Link To Document :
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