Title :
Fabrication of deep microtrenches with inclined parts by laser-induced backside wet etching
Author :
Sato, Tadatake ; Kurosaki, Ryozo ; Kawaguchi, Yoshizo ; Narazaki, Aiko ; Niino, Hiroyuki
Author_Institution :
Photonics Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
Abstract :
Deep trenches with inclined parts were fabricated with laser-induced backside wet etching by gradual shifting the irradiation area. Inclined parts with tilting angle of up to 30deg could be fabricated.
Keywords :
laser beam etching; laser materials processing; microfabrication; optical fabrication; deep microtrenches fabrication; laser-induced backside wet etching; Glass; Laser theory; Micromachining; Optical device fabrication; Optical materials; Optical microscopy; Optical pulses; Scanning electron microscopy; Silicon compounds; Wet etching; Laser micromachining; Laser-induced backside wet etching; Silica glass;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292241
