• DocumentCode
    1973085
  • Title

    Metal Organic Vapor Phase Epitaxy of GaAs on Si Using IIa-Floride Buffer Layers

  • Author

    Tiwari, A.N. ; Freundlich, A. ; Beaumont, B. ; Blunier, S. ; Zogg, H. ; Teodoropol, S. ; Verie, C.

  • Author_Institution
    Physics Institute, University of Zurich, Switzerland
  • fYear
    1992
  • fDate
    8-11 Jun 1992
  • Firstpage
    119
  • Lastpage
    120
  • Keywords
    Backscatter; Buffer layers; Crystallization; Electrons; Epitaxial growth; Gallium arsenide; Strain measurement; X-ray diffraction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
  • Print_ISBN
    0-87942-652-7
  • Type

    conf

  • DOI
    10.1109/MOVPE.1992.664971
  • Filename
    664971