• DocumentCode
    197324
  • Title

    Zn+ implanted silicon waveguide photodiodes for on-chip mid-infrared detection

  • Author

    Grote, Richard R. ; Souhan, Brian ; Ophir, Noam ; Driscoll, Jeffrey B. ; Bergman, Keren ; Bakhru, Hassaram ; Green, William M. J. ; Osgood, Richard M.

  • Author_Institution
    Microelectron. Sci. Labs., Columbia Univ., New York, NY, USA
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We present the first experimental demonstration of Zn+ implanted Si waveguide photodiodes for 2.2-2.4 μm operation. Preliminary responsivities > 65 mA/W are measured, suggesting suitability for on-chip sensing and communications applications in the mid-infrared.
  • Keywords
    elemental semiconductors; infrared detectors; ion implantation; optical waveguides; photodiodes; silicon; zinc; Si:Zn+; on-chip mid-infrared detection; on-chip sensing; responsivities; silicon waveguide photodiodes; wavelength 2.2 mum to 2.4 mum; zinc implantation; Absorption; Optical waveguides; Photodiodes; Silicon; Voltage measurement; Wavelength measurement; Zinc;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2014 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6989999
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=197324