Title :
Zn+ implanted silicon waveguide photodiodes for on-chip mid-infrared detection
Author :
Grote, Richard R. ; Souhan, Brian ; Ophir, Noam ; Driscoll, Jeffrey B. ; Bergman, Keren ; Bakhru, Hassaram ; Green, William M. J. ; Osgood, Richard M.
Author_Institution :
Microelectron. Sci. Labs., Columbia Univ., New York, NY, USA
Abstract :
We present the first experimental demonstration of Zn+ implanted Si waveguide photodiodes for 2.2-2.4 μm operation. Preliminary responsivities > 65 mA/W are measured, suggesting suitability for on-chip sensing and communications applications in the mid-infrared.
Keywords :
elemental semiconductors; infrared detectors; ion implantation; optical waveguides; photodiodes; silicon; zinc; Si:Zn+; on-chip mid-infrared detection; on-chip sensing; responsivities; silicon waveguide photodiodes; wavelength 2.2 mum to 2.4 mum; zinc implantation; Absorption; Optical waveguides; Photodiodes; Silicon; Voltage measurement; Wavelength measurement; Zinc;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
