Title :
MOVPE Growth of Si Planar Doped AIGaAs/lnGaAs Pseudomorphic HEMT Structures
Author :
Sakaguchi, H. ; Tsuchiya, T. ; Meguro, T. ; Nagai, H.
Author_Institution :
Advanced Research Center, Japan
Keywords :
Anisotropic magnetoresistance; Doping; Electric breakdown; Electron mobility; Epitaxial growth; Epitaxial layers; Gallium arsenide; Indium gallium arsenide; PHEMTs;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664974