DocumentCode
197384
Title
High-q free-standing silicon nitride micordisk vertically coupled with on-chip waveguide
Author
Weiqiang Xie ; Van Thourhout, Dries
Author_Institution
Dept. of Inf. Technol., Ghent Univ., Ghent, Belgium
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
We designed and fabricated silicon nitride micordisk-waveguide vertical coupling devices processed at a low temperature of 270°. We experimentally demonstrate an intrinsic quality factor of 7.2×104 in the disk with only 15μm radius operating near 1310nm.
Keywords
Q-factor; micro-optics; optical design techniques; optical fabrication; optical materials; optical waveguides; silicon compounds; SiN; high-q free-standing silicon nitride microdisk; intrinsic quality factor; low temperature; on-chip waveguide; radius 15 mum; silicon nitride micordisk-waveguide vertical coupling devices; wavelength 1310 nm; Couplings; Optical device fabrication; Optical resonators; Optical waveguides; Silicon compounds; System-on-chip; Waveguide discontinuities;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6990029
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