• DocumentCode
    1973851
  • Title

    Selective Growth of Ultra-low Resistance GaAs/lnGaAs for High Performance lnGaAs FETs

  • Author

    Hiruma, K. ; Yazawa, M. ; Matsumoto, H. ; Kagaya, O. ; Miyazaki, M. ; Umemoto, Y.

  • Author_Institution
    Central Research Laboratory, Japan
  • fYear
    1992
  • fDate
    8-11 Jun 1992
  • Firstpage
    126
  • Lastpage
    127
  • Keywords
    Contact resistance; Doping; Electrical resistance measurement; Epitaxial growth; FETs; Gallium arsenide; Gold; Indium gallium arsenide; Laboratories; Lattices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
  • Print_ISBN
    0-87942-652-7
  • Type

    conf

  • DOI
    10.1109/MOVPE.1992.664975
  • Filename
    664975
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1973851