Quasi-TEM model for coplanar waveguide on silicon

Author

Williams, Dylan F. ; Janezic, Michael D. ; Ralston, Andrew R K ; List, R.Scott

Author_Institution

Nat. Inst. of Stand. & Technol., Boulder, CO, USA

fYear

1997

fDate

27-29 Oct. 1997

Firstpage

225

Lastpage

228

Abstract

This paper compares a simple quasi-TEM model for coplanar waveguide fabricated on moderately doped silicon substrates to measurement. While the coplanar waveguide currents and magnetic fields are unaffected by the substrate, a simple capacitive model can accurately account for the effects of the substrate.

Keywords

MMIC; capacitance; coplanar waveguides; integrated circuit packaging; modelling; silicon; substrates; CPW; Si; capacitive model; coplanar waveguide; doped Si substrates; quasi-TEM model; Calibration; Capacitance measurement; Coplanar waveguides; Dielectric substrates; Electrical resistance measurement; Electronic mail; Impedance; Length measurement; Magnetic field measurement; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Performance of Electronic Packaging, 1997., IEEE 6th Topical Meeting on

Conference_Location

Austin, TX

Print_ISBN

0-7803-8649-3

Type

conf

DOI

10.1109/EPEP.1997.634076

Filename

634076

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1974643