Title :
Quasi-TEM model for coplanar waveguide on silicon
Author :
Williams, Dylan F. ; Janezic, Michael D. ; Ralston, Andrew R K ; List, R.Scott
Author_Institution :
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
Abstract :
This paper compares a simple quasi-TEM model for coplanar waveguide fabricated on moderately doped silicon substrates to measurement. While the coplanar waveguide currents and magnetic fields are unaffected by the substrate, a simple capacitive model can accurately account for the effects of the substrate.
Keywords :
MMIC; capacitance; coplanar waveguides; integrated circuit packaging; modelling; silicon; substrates; CPW; Si; capacitive model; coplanar waveguide; doped Si substrates; quasi-TEM model; Calibration; Capacitance measurement; Coplanar waveguides; Dielectric substrates; Electrical resistance measurement; Electronic mail; Impedance; Length measurement; Magnetic field measurement; Silicon;
Conference_Titel :
Electrical Performance of Electronic Packaging, 1997., IEEE 6th Topical Meeting on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-8649-3
DOI :
10.1109/EPEP.1997.634076
