Title :
Reliability of surface micromachined MicroElectroMechanical actuators
Author :
Tanner, Dandle M.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
This paper will review some of the investigations into MicroElectroMechanical systems (MEMS) reliability. It will categorize the major reliability issues of MEMS actuators. Reliability concerns of stiction, mechanical wear, fracture, fatigue, shock, and vibration will be discussed
Keywords :
microactuators; micromachining; reliability; MEMS device; fatigue; fracture; mechanical wear; microelectromechanical actuator; reliability; shock; stiction; surface micromachining; vibration; Actuators; Chemical sensors; Electric shock; Failure analysis; Fatigue; Friction; Microelectromechanical systems; Micromechanical devices; Surface cracks; Vibrations;
Conference_Titel :
Microelectronics, 2000. Proceedings. 2000 22nd International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-5235-1
DOI :
10.1109/ICMEL.2000.840535
