DocumentCode
1975090
Title
Reliability of surface micromachined MicroElectroMechanical actuators
Author
Tanner, Dandle M.
Author_Institution
Sandia Nat. Labs., Albuquerque, NM, USA
Volume
1
fYear
2000
fDate
2000
Firstpage
97
Abstract
This paper will review some of the investigations into MicroElectroMechanical systems (MEMS) reliability. It will categorize the major reliability issues of MEMS actuators. Reliability concerns of stiction, mechanical wear, fracture, fatigue, shock, and vibration will be discussed
Keywords
microactuators; micromachining; reliability; MEMS device; fatigue; fracture; mechanical wear; microelectromechanical actuator; reliability; shock; stiction; surface micromachining; vibration; Actuators; Chemical sensors; Electric shock; Failure analysis; Fatigue; Friction; Microelectromechanical systems; Micromechanical devices; Surface cracks; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2000. Proceedings. 2000 22nd International Conference on
Conference_Location
Nis
Print_ISBN
0-7803-5235-1
Type
conf
DOI
10.1109/ICMEL.2000.840535
Filename
840535
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