DocumentCode

1975138

Title

Dual Chamber Active Charcoal Scrubber

Author

Moerman, I. ; Coudenys, G. ; Demeester, P. ; Grantham, T. ; Crawley, J.

Author_Institution

University of Gent-IMEC, Belgium

fYear

1992

fDate

8-11 Jun 1992

Firstpage

140

Lastpage

141

Keywords

Acoustics; Chemicals; Epitaxial growth; Epitaxial layers; Gases; Indium phosphide; Nitrogen; Oxidation; Safety; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference

Print_ISBN

0-87942-652-7

Type

conf

DOI

10.1109/MOVPE.1992.664982

Filename

664982