The Effect of Substrate Clamping on Piezoelectric Thin-Film Parameters

Author

Al Ahmad, Mahmoud ; Coccetti, F. ; Plana, R.

Author_Institution

LAAS CNRS, Toulouse

fYear

2007

fDate

11-14 Dec. 2007

Firstpage

1

Lastpage

4

Abstract

The behaviour of the piezoelectric materials is determined by its coefficient d₃₃ which describes the strain parallel to the polarization vector of the ceramics. Full sheet characterization is essential to understand material behavior when it´s clamped on the substrate. In this work, full field 3D non- contact surface measurements based on optical interferometer from FOGALE Nanotech with vertical resolution down to 0.1 nm is used to measure the piezoelectric coefficients of PZT thin film. The measurements analysis predicts a reduction of 50% for the d₃₃ values.

Keywords

light interferometers; nanotechnology; piezoelectric thin films; polarisation; FOGALE Nanotech; optical interferometer; piezoelectric thin-film; polarization vector; substrate clamping; Capacitive sensors; Ceramics; Clamps; Optical films; Optical interferometry; Optical polarization; Piezoelectric films; Piezoelectric materials; Piezoelectric polarization; Substrates; MEMS; Piezoelectric materials; material parameters; sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2007. APMC 2007. Asia-Pacific

Conference_Location

Bangkok

Print_ISBN

978-1-4244-0748-4

Electronic_ISBN

978-1-4244-0749-1

Type

conf

DOI

10.1109/APMC.2007.4554764

Filename

4554764