Design of a novel CPW structure employing triangle-shape groove

This paper presents a new class of Si-based micromachined line operated at the range of 105 GHz - 113 GHz. In this line, which is a finite-ground coplanar-waveguide (FGC) type, Si-based micromachining is used to remove the dielectric material with a new kind of geometry shape from the aperture regions to minimize propagation loss. The simulation results show a considerable loss reduction comparing with the traditional CPW. The returning loss of the designed structure is below -40 dB between 105 GHz - 113 GHz, and the minimum returning loss reaches -55 dB at 109 GHz.