Design and Development of Microstrip Low Pass Filters at K-band Using MEMS Technology

Author

Sharma, Preeti ; Koul, Shiban K. ; Chandra, Sudhir

Author_Institution

Centre for Appl. Res. in Electron., Indian Inst. of Technol., Delhi

fYear

2007

fDate

11-14 Dec. 2007

Firstpage

1

Lastpage

4

Abstract

This paper reports two variants of a membrane- supported microstrip low-pass filter (LPF) fabricated using bulk micromachining technique. The two proposed LPFs exhibit low transmission loss (< 2 dB) in the entire pass-band with high out - of-band rejection characteristics. The maximum measured rejection level is better than 50 dB. One of the proposed variant has been diligently designed to deliver high rejection performance with relatively rigid mechanical structure over the other variant thus making it suitable for easy integration and packaging.

Keywords

low-pass filters; micromachining; micromechanical devices; microstrip filters; K-band; MEMS technology; bulk micromachining technique; microstrip low pass filter; Biomembranes; Circuits; Dielectric losses; Dielectric substrates; K-band; Low pass filters; Micromachining; Micromechanical devices; Microstrip filters; Silicon; MEMS Technology; Microstrip Low-pass Filter; Si Bulk Micromachining; Thin Dielectric Membrane;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2007. APMC 2007. Asia-Pacific

Conference_Location

Bangkok

Print_ISBN

978-1-4244-0748-4

Electronic_ISBN

978-1-4244-0749-1

Type

conf

DOI

10.1109/APMC.2007.4554797

Filename

4554797