Woodpile photonic crystal nanocavity by two-directional etching without wafer bonding

Author

Tang, Lingling ; Yoshie, Tomoyuki

Author_Institution

Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA

fYear

2009

fDate

30-3 Aug. 2009

Firstpage

1

Lastpage

2

Abstract

Compact ultra-high-Q modes are designed in a woodpile photonic crystal by modulating unit cell size along a waveguide in a complete photonic band gap. These designs provide a means of simplifying the fabrication of woodpile photonic crystal nanocavities. The designed nanocavities are fabricated with a two-directional etching approach without wafer bonding.

Keywords

Q-factor; etching; microcavities; nanophotonics; optical design techniques; optical fabrication; optical resonators; optical waveguides; photonic band gap; photonic crystals; 3D photonic crystal resonators; Q factor; compact ultrahigh-Q modes; complete photonic band gap; optical fabrication; optical waveguide; two-directional etching; unit cell modulation method; woodpile photonic crystal nanocavity design; Chromium; Etching; Fabrication; Optical resonators; Optical waveguides; Photonic band gap; Photonic crystals; Q factor; Wafer bonding; Waveguide discontinuities; Photonic crystals; Resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on

Conference_Location

Shanghai

Print_ISBN

978-1-4244-3829-7

Electronic_ISBN

978-1-4244-3830-3

Type

conf

DOI

10.1109/CLEOPR.2009.5292417

Filename

5292417