DocumentCode :
1977327
Title :
A Method for Dosing Solid Sources for MOVPE: Excellent Dosimtery Reproducibility from a Saturated Solution of Trimethylindium
Author :
Frigo, Dario M. ; Van Mier, Guido P M ; Gal, Anton W. ; Wilkie, James H.
Author_Institution :
Billiton Precursors B.V., Netherlands
fYear :
1992
fDate :
8-11 Jun 1992
Firstpage :
154
Lastpage :
155
Keywords :
Capacitance-voltage characteristics; Crystals; Dosimetry; Epitaxial growth; Epitaxial layers; Indium phosphide; Reproducibility of results; Solids; Solvents; Surface contamination;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
Type :
conf
DOI :
10.1109/MOVPE.1992.664991
Filename :
664991
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1977327
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