Fabrication of Millimeter-Wave PTFE-Filled Waveguide Using SR Direct Etching

Author

Kishihara, Mitsuyoshi ; Ukita, Yoshiaki ; Yamamoto, Shigeaki ; Utsumi, Yuichi ; Ohta, Isao

Author_Institution

Fac. of Comput. Sci. & Syst. Eng., Okayama Prefectural Univ., Okayama

fYear

2007

fDate

11-14 Dec. 2007

Firstpage

1

Lastpage

4

Abstract

A metallic waveguide is one of effective media guiding a millimeter- and submillimeter-wave because of the advantage of low loss. In this paper, trial fabrication of a PTFE-filled rectangular waveguide for millimeter-wave components is attempted with the use of the SR direct etching process, sputter deposition of metal, and electroplating. The fabrication procedure for the PTFE-filled waveguide is described and the measured frequency characteristics of the PTFE-filled waveguide mitered bends are shown.

Keywords

electroplating; millimetre wave devices; rectangular waveguides; sputter deposition; synchrotron radiation; waveguide discontinuities; PTFE-filled rectangular waveguide; SR direct etching process; electroplating; measured frequency characteristics; millimeter-wave PTFE-filled waveguide fabrication; millimeter-wave components; polytetrafluoroethylene microstructures; sputter deposition; synchrotron radiation etching; Cutoff frequency; Dielectric materials; Microwave technology; Millimeter wave technology; Optical device fabrication; Optical waveguides; Sputter etching; Strontium; Submillimeter wave technology; Waveguide components; Microdevice; Millimeter-wave; SR etching; Waveguide; Waveguide bend;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2007. APMC 2007. Asia-Pacific

Conference_Location

Bangkok

Print_ISBN

978-1-4244-0748-4

Electronic_ISBN

978-1-4244-0749-1

Type

conf

DOI

10.1109/APMC.2007.4554868

Filename

4554868