Title :
Full-Gap Positioning of Parallel-Plate Electrostatic MEMS Using On-off Control
Author :
Mol, Lukas ; Cretu, Edmond ; Rocha, Luis A. ; Wolffenbuttel, Reinoud F.
Author_Institution :
Delft Univ. of Technol., Delft
Abstract :
Electrostatic parallel-plate actuators are classically limited to displacements up to 1/3 of the gap due to the pull-in effect [1],[2|. A closed-loop feedback based method presented in [3] is recently introduced to overcome this limitation. Optimized structures are designed to minimize residual position ripple while maintaining bandwidth, effectively reducing the required device size of positioning electrostatic actuators by a factor three.
Keywords :
electrostatic actuators; closed-loop feedback; electrostatic actuator; electrostatic parallel-plate actuator; full-gap positioning; on-off control; optimized structure; parallel-plate electrostatic MEMS; Capacitors; Damping; Electrostatic actuators; Feedback; Microelectronics; Micromechanical devices; Shock absorbers; Springs; Switches; Voltage;
Conference_Titel :
Industrial Electronics, 2007. ISIE 2007. IEEE International Symposium on
Conference_Location :
Vigo
Print_ISBN :
978-1-4244-0754-5
Electronic_ISBN :
978-1-4244-0755-2
DOI :
10.1109/ISIE.2007.4374817
