Dynamic Characterisation of Piezo resistive Sensor Systems for Adaptronic Devices

This paper deals with the static and dynamic characterisation of novel piezo resistive diamond like carbon layers which can be fabricated with high hardness and wear resistance. The advantage of these films, deposited in a plasma enhanced chemical vapor deposition process (PECVD), is the possibility to integrate them in a stiff environment for the detection of load. This is due to the fact, that they do not need any deformation like stain gauges. This property makes them interesting for adaptronic applications.