1978211

Monitoring Surface Coverage and Reconstruction Changes Under GaAs AlAs and InAs MOCVD Conditions Using Reflectance Anisotropy

Armstrong, S.R. ; Hoare, R.D. ; Pemble, M.E. ; Povey, I.M. ; Stafford, A. ; Taylor, A.G. ; Fawcett, P. ; Joyce, B.A. ; Neave, J.H. ; Klug, D. ; Zhang, J.

Department of Chemistry and Centre for Electronic Materials, UMIST, UK

1992

8-11 Jun 1992

177

177

Anisotropic magnetoresistance; Condition monitoring; Educational institutions; Gallium arsenide; MOCVD; Real time systems; Reflectivity; Rough surfaces; Surface reconstruction; Surface roughness;

English

ieee

Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference

0-87942-652-7

conf

10.1109/MOVPE.1992.665003

665003