Title :
Atomic Layer Epitaxy of CdTe on GaAs by Organometallic Vapor Phase Epitaxy
Author :
Wang, W.S. ; Ehsani, H.E. ; Bhat, I.B.
Author_Institution :
Electrical, Computer and Systems Engineering Department, Rensselaer Polytechnic Institute, NY
Keywords :
Atomic layer deposition; Epitaxial growth; Gallium arsenide; Inductors; Lattices; Substrates; Surface morphology; Systems engineering and theory; Tellurium; Temperature;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.665008