Title :
Sensor MEMS/NEMS based on multilayer dielectric nanostructures
Author :
Koleshko, Vladimir ; Gulay, Anatoliy ; Gulay, Viacheslav ; Voronko, Natalia
Author_Institution :
Inteligent Syst. Dept., Belorussian Nat. Tech. Univ., Minsk
Abstract :
Structural and technological solutions of sensor MEMS are provided for controlling the composition of gaseous environments. Multilayer structures based on super thin zinc oxide films are used as the sensitive elements of nanosensors. A sensor interface is simulated as a ldquosystem on crystalrdquo in the form of a super-big integrated microcircuit.
Keywords :
microsensors; multilayers; nanosensors; thin film sensors; zinc compounds; MEMS sensor; NEMS sensor; gaseous environment; multilayer dielectric nanostructures; nanosensors; super-big integrated microcircuit; thin zinc oxide films; Dielectric thin films; Gas detectors; Micromechanical devices; Nanoelectromechanical systems; Nanostructures; Nonhomogeneous media; Sensor systems; Silicon; Thin film sensors; Zinc oxide; Sensor MEMS/NEMS for control of gases; sensor interface as a “system on crystal”; superthin zinc oxides;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on
Conference_Location :
Zakarpattya
Print_ISBN :
978-966-2191-06-6
