A 3-axis PZT-based MEMS gyroscope in 0.18μm CMOS

Author

Ahmed, Imran ; Halupka, David ; Leesti, Bertram ; Cherry, James A. ; McKenzie, Rob ; Nilchi, Alireza ; Mazhab-Jafari, Hamed ; Snelgrove, Martin ; Chik, Raymond

Author_Institution

Kapik Integration, Toronto, ON, Canada

fYear

2012

fDate

17-21 Sept. 2012

Firstpage

241

Lastpage

244

Abstract

A 3-axis interface for a PZT-based MEMS gyroscope uses a PLL-less architecture and does not require high-voltage devices nor charge-pumps. The use of PZT in the MEMS enables a low-cost package which does not require the MEMS to be vacuum sealed. A single amplifier is used to simultaneously amplify actuation and Coriolis signals, thereby maintaining orthogonal phase between the signals. The ASIC has an inherent Allan variance of 0.13 °/s/√Hz, and 1, 0.35, and 0.66 °/s/√Hz for the ASIC plus x, y, and z axes respectively. The ASIC utilizes 6.2mA of current and 6.22mm² of total area (including I/Os).

Keywords

CMOS integrated circuits; amplifiers; application specific integrated circuits; gyroscopes; lead compounds; microsensors; piezoelectric transducers; 3-axis PZT-based MEMS gyroscope; ASIC; CMOS; Coriolis signals; PLL-less architecture; PZT; actuation amplification; current 6.2 mA; inherent Allan variance; low-cost package; orthogonal phase; single amplifier; size 0.18 mum; Application specific integrated circuits; Band pass filters; Electrostatics; Gyroscopes; Micromechanical devices; Temperature measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

ESSCIRC (ESSCIRC), 2012 Proceedings of the

Conference_Location

Bordeaux

ISSN

1930-8833

Print_ISBN

978-1-4673-2212-6

Electronic_ISBN

1930-8833

Type

conf

DOI

10.1109/ESSCIRC.2012.6341303

Filename

6341303