DocumentCode
1979502
Title
Nanostructuring technologies for reliable moveable elements
Author
Labunov, V.A. ; Timoshkov, Yu.V. ; Kurmashev, V.I. ; Timoshkov, V.Yu. ; Sakova, A.A.
Author_Institution
Belarus State Univ. of Inf. & Radioelectron., Minsk
fYear
2009
fDate
22-24 April 2009
Firstpage
50
Lastpage
52
Abstract
Micro and nanosystems are the completed devices that combine into one sensor, electronic, and mechanical parts. Realization of the mechanical interaction between nano-, micro-, and macro world is the limiting factor for such a complex system.
Keywords
nanocomposites; nanotechnology; reliability; mechanical interaction; microsystems; nanostructuring technologies; nanosystems; reliable moveable elements; Anisotropic magnetoresistance; Magnetic films; Magnetic heads; Microelectronics; Micromechanical devices; Nanoporous materials; Nanoscale devices; Nanostructured materials; Shape; Silicon; LIGA-like technology; Mechanical moveable elements; nanocomposite materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on
Conference_Location
Zakarpattya
Print_ISBN
978-966-2191-06-6
Type
conf
Filename
5069701
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