DocumentCode
1979702
Title
Intelligent microsystems: convergence at the analog-digital interface
Author
Leheny, R.F.
Author_Institution
Microsyst. Technol. Office, Defense Adv. Res. Projects Agency, Arlington, VA, USA
fYear
2003
fDate
23-25 June 2003
Firstpage
3
Abstract
Summary form only given: The last two decades have witnessed significant advances in high speed electronics, photonics and MEMS devices for applications in information systems. In this presentation I will review the challenges and opportunities that exist in the coming decade as silicon CMOS technology approaches the end of the scaling paradigm that has been the driving force for Moore´s Law and new capabilities for compound semiconductor electronics in high speed applications emerge. These challenges will be discussed in the context of parallel advances in photonic and MEMS devices, that taken together, offer the opportunity for realizing the integration of electronic, photonic and MEMS technologies in ways that will greatly enhance the capability for intelligent control of chip-scale microsystems for application in future information systems.
Keywords
CMOS integrated circuits; elemental semiconductors; high-speed integrated circuits; intelligent control; micromechanical devices; scaling circuits; silicon; MEMS devices; Moores Law; Si; analog-digital interface; chip-scale microsystems; compound semiconductor electronics; driving force; electronic integration; high speed electronics; information systems; intelligent control; intelligent microsystems; photonic integration; photonics; scaling paradigm; silicon CMOS technology; Analog-digital conversion; CMOS technology; Convergence; High-speed electronics; Information systems; Microelectromechanical devices; Micromechanical devices; Moore´s Law; Photonics; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 2003
Print_ISBN
0-7803-7727-3
Type
conf
DOI
10.1109/DRC.2003.1226846
Filename
1226846
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