DocumentCode
1979873
Title
Novel MEMS fully differential capacitive transducer design and analysis
Author
Ya, Ma Li ; Khan, Sheroz ; Nordin, Anis Nurashikin ; Al-Khateeb, Khalid A S ; Islam, Muhammad Rafiqul ; Naji, Ahmed Wathik
Author_Institution
Dept. of Electr. & Comput. Eng., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia
fYear
2011
fDate
17-19 May 2011
Firstpage
1
Lastpage
4
Abstract
This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a good level of linearity as regard changes in capacitance as a function of force change.
Keywords
acceleration measurement; capacitive sensors; microsensors; pressure measurement; transducers; MEMS fully differential capacitive transducer analysis; MEMS fully differential capacitive transducer design; acceleration measurement; capacitive sensor; force change parameter measurement; microelectromechanical system; pressure measurement; Capacitance; Capacitive sensors; Force; Integrated circuit modeling; Materials; Micromechanical devices; CMOS; MEMS; differential capacitive sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics (ICOM), 2011 4th International Conference On
Conference_Location
Kuala Lumpur
Print_ISBN
978-1-61284-435-0
Type
conf
DOI
10.1109/ICOM.2011.5937152
Filename
5937152
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