Title :
Polymer Microrings Integrated with Thin Film InGaAs MSM Photodetectors for Sensor-On-a-Chip Applications
Author :
Cho, Sang-Yeon ; Jokerst, Nan Marie
Author_Institution :
Duke Univ., Durham, NC
Abstract :
A polymer microring has been integrated with an InGaAs photodetector on a Si substrate for chip scale sensing applications. The photocurrent as a function of wavelength agrees well with the spectral response of the microring. This integration of a microring and photodetector onto Si is a first step toward the next generation of "sensor-on-a-chip" integrated systems
Keywords :
integrated optics; metal-semiconductor-metal structures; microcavities; optical polymers; optical resonators; optical sensors; photoconductivity; photodetectors; InGaAs; InGaAs MSM photodetector; Si; Si substrate; photocurrent; polymer microrings; sensor-on-a-chip; Biosensors; Chemical and biological sensors; Indium gallium arsenide; Optical films; Optical resonators; Optical sensors; Optoelectronic and photonic sensors; Photodetectors; Polymer films; Thin film sensors;
Conference_Titel :
Indium Phosphide and Related Materials Conference Proceedings, 2006 International Conference on
Conference_Location :
Princeton, NJ
Print_ISBN :
0-7803-9558-1
DOI :
10.1109/ICIPRM.2006.1634154
