Title :
High-order microring filters on SOI wafer
Author :
Wang, Shi-Jun ; Xiao, Jin-Long ; Huang, Yong-Zhen
Author_Institution :
State Key Lab. on Integrated Optoelectron., Chinese Acad. of Sci., Beijing, China
Abstract :
Series-coupled high-order microring channel drop filters are designed and fabricated by CMOS technique on SOI wafer. The transmission spectra with the drop channel bandwidth of 0.028 nm are observed for the filter based on three coupled rings with the radius of 20 mum, and coupling-induced resonance frequency shifts on fifth-order microrings filter are observed experimentally.
Keywords :
CMOS integrated circuits; integrated optics; light transmission; micro-optics; optical fabrication; optical filters; resonance; silicon-on-insulator; CMOS technique; SOI wafer; Si; coupling-induced resonance frequency; drop channel bandwidth; fifth-order microring filter; microring channel drop filter fabrication; series-coupled high-order microring filter design; size 20 mum; transmission spectra; Band pass filters; Bandwidth; CMOS technology; Couplings; Electromagnetic waveguides; Optical fiber polarization; Optical filters; Optical waveguides; Q factor; Resonance; Q factor; SOI; high-order microring filters;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292632
