• DocumentCode
    1981616
  • Title

    Development of ZnO/SiO2/Si love mode surface acoustic wave devices with high sensitivity for biosensor applications

  • Author

    Krishnamoorthy, Soumya ; Iliadis, Agis A.

  • fYear
    2006
  • fDate
    2006
  • Firstpage
    14
  • Lastpage
    17
  • Keywords
    Acoustic materials; Acoustic propagation; Acoustic waves; Biosensors; Frequency; Piezoelectric devices; Piezoelectric materials; Substrates; Surface acoustic wave devices; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors Applications Symposium, 2006. Proceedings of the 2006 IEEE
  • Print_ISBN
    0-7803-9580-8
  • Type

    conf

  • DOI
    10.1109/SAS.2006.1634227
  • Filename
    1634227