DocumentCode
1982223
Title
Growth of lnAsP/lnP Heterostructures by Low-Pressure Metalorganic Chemical Vapor Deposition Using Tertiarybutylarsine
Author
Tran, C.A. ; Masut, R.A. ; Brebner, J.L. ; Leonelli, R. ; Cova, P.
Author_Institution
Groupe de Recherche en Physique et Technologies des Couches Minces Montreal Thin Film Group, Canada
fYear
1992
fDate
8-11 Jun 1992
Firstpage
238
Lastpage
239
Keywords
Ash; Atomic measurements; Chemical technology; Chemical vapor deposition; Indium phosphide; Lattices; MOCVD; Superlattices; Temperature; X-ray diffraction;
fLanguage
English
Publisher
ieee
Conference_Titel
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN
0-87942-652-7
Type
conf
DOI
10.1109/MOVPE.1992.665034
Filename
665034
Link To Document