Title :
Growth of lnAsP/lnP Heterostructures by Low-Pressure Metalorganic Chemical Vapor Deposition Using Tertiarybutylarsine
Author :
Tran, C.A. ; Masut, R.A. ; Brebner, J.L. ; Leonelli, R. ; Cova, P.
Author_Institution :
Groupe de Recherche en Physique et Technologies des Couches Minces Montreal Thin Film Group, Canada
Keywords :
Ash; Atomic measurements; Chemical technology; Chemical vapor deposition; Indium phosphide; Lattices; MOCVD; Superlattices; Temperature; X-ray diffraction;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.665034