DocumentCode :
1982223
Title :
Growth of lnAsP/lnP Heterostructures by Low-Pressure Metalorganic Chemical Vapor Deposition Using Tertiarybutylarsine
Author :
Tran, C.A. ; Masut, R.A. ; Brebner, J.L. ; Leonelli, R. ; Cova, P.
Author_Institution :
Groupe de Recherche en Physique et Technologies des Couches Minces Montreal Thin Film Group, Canada
fYear :
1992
fDate :
8-11 Jun 1992
Firstpage :
238
Lastpage :
239
Keywords :
Ash; Atomic measurements; Chemical technology; Chemical vapor deposition; Indium phosphide; Lattices; MOCVD; Superlattices; Temperature; X-ray diffraction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
Type :
conf
DOI :
10.1109/MOVPE.1992.665034
Filename :
665034
Link To Document :
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