Title :
Investigation on laser cleaning of thin films deposited on sapphire
Author :
Palani, I.A. ; Kumeda, A. ; Matsumoto, T. ; Higashihata, M. ; Okada, T.
Author_Institution :
Dept of Mech. Eng., Indian Inst. of Technol. Madras, Chennai, India
Abstract :
The selective and large area laser cleaning of thin films deposited on sapphire substarte was experimentally investigated. The parameters are optimized for efficient cleaning and the samples were analyzed through SEM and AFM.
Keywords :
atomic force microscopy; laser materials processing; sapphire; scanning electron microscopy; surface cleaning; AFM; SEM; atomic force microscopy; sapphire substarte; scanning electron microscopy; thin films laser cleaning; Atomic force microscopy; Chemical technology; Cleaning; Laser ablation; Pulsed laser deposition; Scanning electron microscopy; Semiconductor thin films; Sputtering; Substrates; Zinc oxide; Nd3+:YAG; laser cleaning; sapphire substrate; thin films;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292676
