DocumentCode
1983006
Title
In-Situ Formation of As-H-Functions by β-Elimination of Specific Metalorganic Arsenic Compounds for the MOVPE of III/V-Semiconductors
Author
Zimmerman, G. ; Protzmann, H. ; Stolz, W. ; Gobel, E.O. ; Gimmnich, P. ; Greiling, A. ; Lorberth, J. ; Thalmann, C. ; Rademann, K.
Author_Institution
Philipps-Universitat, Germany
fYear
1992
fDate
8-11 Jun 1992
Firstpage
244
Lastpage
244
Keywords
Ash; Detectors; Epitaxial growth; Epitaxial layers; Gallium arsenide; Inductors; Mass spectroscopy; Temperature distribution; Thermal decomposition; Toxic chemicals;
fLanguage
English
Publisher
ieee
Conference_Titel
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN
0-87942-652-7
Type
conf
DOI
10.1109/MOVPE.1992.665037
Filename
665037
Link To Document