DocumentCode :
1983766
Title :
Chemical Beam Epitaxy of GaAs Films Using Single-Source Precursors
Author :
Ekerdt, John G. ; Miller, James E. ; Mardones, Miguel A. ; Nail, John W. ; Cowley, Alan H. ; Jones, Richard A.
Author_Institution :
Departments of Chemical Engineering and Chemistry University of Texas at Austin
fYear :
1992
fDate :
8-11 Jun 1992
Firstpage :
247
Lastpage :
247
Keywords :
Chemical engineering; Chemistry; Epitaxial growth; Epitaxial layers; Gallium arsenide; Inductors; Molecular beam epitaxial growth; Sputtering; Substrates; Temperature distribution;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
Type :
conf
DOI :
10.1109/MOVPE.1992.665040
Filename :
665040
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1983766
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