Title :
The challenges facing open access nanofabrication facilities
Author :
McKenzie, Warren
Author_Institution :
Australian Nat. Fabrication Facility, Australia
fDate :
Aug. 28 2011-Sept. 1 2011
Abstract :
This paper explores the challenges faced when creating and operating genuinely open-access facilities, provides an introduction to the ANFF facilities and access mechanisms and describes how these facilities can benefit researchers requiring fabrication of semiconductor and electro-optic devices.
Keywords :
electro-optical devices; nanofabrication; nanophotonics; optical fabrication; ANFF facilities; access mechanisms; electro-optic devices; genuinely open-access nanofabrication facilities; semiconductor fabrication; Australia; Collaboration; Fabrication; Industries; Materials; Nanofabrication; Photonics;
Conference_Titel :
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4577-1939-4
DOI :
10.1109/IQEC-CLEO.2011.6193668
