• DocumentCode
    1983897
  • Title

    The challenges facing open access nanofabrication facilities

  • Author

    McKenzie, Warren

  • Author_Institution
    Australian Nat. Fabrication Facility, Australia
  • fYear
    2011
  • fDate
    Aug. 28 2011-Sept. 1 2011
  • Firstpage
    1214
  • Lastpage
    1214
  • Abstract
    This paper explores the challenges faced when creating and operating genuinely open-access facilities, provides an introduction to the ANFF facilities and access mechanisms and describes how these facilities can benefit researchers requiring fabrication of semiconductor and electro-optic devices.
  • Keywords
    electro-optical devices; nanofabrication; nanophotonics; optical fabrication; ANFF facilities; access mechanisms; electro-optic devices; genuinely open-access nanofabrication facilities; semiconductor fabrication; Australia; Collaboration; Fabrication; Industries; Materials; Nanofabrication; Photonics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
  • Conference_Location
    Sydney, NSW
  • Print_ISBN
    978-1-4577-1939-4
  • Type

    conf

  • DOI
    10.1109/IQEC-CLEO.2011.6193668
  • Filename
    6193668
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1983897