DocumentCode :
1984228
Title :
Research of Combined Triaxial High-g Accelerometer
Author :
Xu He ; Zhenhai Zhang ; Kejie Li ; Ran Lin ; Liang Zhang ; Zhiqing Li
Author_Institution :
Beijing Inst. of Technol., Beijing, China
Volume :
2
fYear :
2013
fDate :
28-29 Oct. 2013
Firstpage :
185
Lastpage :
188
Abstract :
This paper shows the design of a combined triaxial high-g accelerometer. The accelerometer inherits the traditional advantages of piezoresistive sensors and reduces the interference between the coordinate axes. At first, Finite Element Analysis is carried out on the single axis high-g accelerometer chip in structure. Secondly, the overall core structure is analyzed and the result of simulation shows that the structure of combined triaxial high-g accelerometer is reasonable and can work well under high impact load. Finally, the combined triaxial high-g accelerometer is validated by high impact calibration experiment in order to get all key parameters, include range, sensitivity and so on. These data are accord with the design requirements but some problems are exposed and will be solved by improving the process technology.
Keywords :
accelerometers; calibration; interference suppression; microsensors; piezoresistive devices; MEMS; calibration; combined triaxial high-g accelerometer; finite element analysis; interference reduction; piezoresistive sensor; process technology; Acceleration; Accelerometers; Finite element analysis; Load modeling; Sensors; Strain; Stress; High-g; MEMS; Triaxial accelerometer;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Computational Intelligence and Design (ISCID), 2013 Sixth International Symposium on
Conference_Location :
Hangzhou
Type :
conf
DOI :
10.1109/ISCID.2013.160
Filename :
6804859
Link To Document :
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