Title :
Modelling of MEMS optical switches
Author :
Shanmugapriya, M. ; Meenakshi, M.
Author_Institution :
Coll. of Eng., Guindy, Anna Univ., Chennai, India
Abstract :
In this paper, a novel circular structure for MEMS switch is proposed. The MEMS switch is designed to have a movable mirror on a silicon substrate. The tilt of the movable mirror is done by the electrostatic actuator. The electrostatic actuator tilts the mirror to the desired position, so that the optical signals are switched to ON or OFF condition. The performance of the switch is analyzed using INTELLISUITE, MEMS software.
Keywords :
electrostatic actuators; micro-optomechanical devices; micromirrors; optical switches; silicon; INTELLISUITE MEMS software; MEMS optical switch; Si; electrostatic actuator; movable mirror; Crystalline materials; Electrostatic actuators; Micromechanical devices; Micromirrors; Microswitches; Mirrors; Optical switches; Polarization; Polymers; Silicon; MEMS; Micromirror; electrostatic actuator;
Conference_Titel :
Emerging Trends in Electronic and Photonic Devices & Systems, 2009. ELECTRO '09. International Conference on
Conference_Location :
Varanasi
Print_ISBN :
978-1-4244-4846-3
DOI :
10.1109/ELECTRO.2009.5441047
