• DocumentCode
    1987360
  • Title

    Thermal expansion coefficients of obliquely deposited LaF3 thin films

  • Author

    Jaing, Cheng-Chung ; Liu, Ming-Chung ; Feng, Ping-Chi ; Tang, Chien-Jen ; Liou, Yeuh-Yeong ; Liao, Bo-Huei ; Lee, Cheng-Chung

  • Author_Institution
    Dept. of Optoelectron. Syst. Eng., Minghsin Univ. of Sci. & Technol., Hsinchu, Taiwan
  • fYear
    2011
  • fDate
    Aug. 28 2011-Sept. 1 2011
  • Firstpage
    1291
  • Lastpage
    1293
  • Abstract
    Effects of columnar angles on the thermal expansion coefficients of LaF3 films were investigated. The LaF3 films with columnar micro structures were obliquely deposited on two types of glass substrates by means of resistive heating evaporation.
  • Keywords
    heat treatment; lanthanum compounds; optical films; optical materials; thermal expansion; thin films; vacuum deposition; LaF3; SiO2; columnar angles; columnar microstructures; glass substrates; obliquely deposited thin films; resistive heating evaporation; thermal expansion coefficients; Films; Glass; Heating; Substrates; Temperature measurement; Thermal expansion; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
  • Conference_Location
    Sydney, NSW
  • Print_ISBN
    978-1-4577-1939-4
  • Type

    conf

  • DOI
    10.1109/IQEC-CLEO.2011.6193820
  • Filename
    6193820