DocumentCode
1987360
Title
Thermal expansion coefficients of obliquely deposited LaF3 thin films
Author
Jaing, Cheng-Chung ; Liu, Ming-Chung ; Feng, Ping-Chi ; Tang, Chien-Jen ; Liou, Yeuh-Yeong ; Liao, Bo-Huei ; Lee, Cheng-Chung
Author_Institution
Dept. of Optoelectron. Syst. Eng., Minghsin Univ. of Sci. & Technol., Hsinchu, Taiwan
fYear
2011
fDate
Aug. 28 2011-Sept. 1 2011
Firstpage
1291
Lastpage
1293
Abstract
Effects of columnar angles on the thermal expansion coefficients of LaF3 films were investigated. The LaF3 films with columnar micro structures were obliquely deposited on two types of glass substrates by means of resistive heating evaporation.
Keywords
heat treatment; lanthanum compounds; optical films; optical materials; thermal expansion; thin films; vacuum deposition; LaF3; SiO2; columnar angles; columnar microstructures; glass substrates; obliquely deposited thin films; resistive heating evaporation; thermal expansion coefficients; Films; Glass; Heating; Substrates; Temperature measurement; Thermal expansion; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location
Sydney, NSW
Print_ISBN
978-1-4577-1939-4
Type
conf
DOI
10.1109/IQEC-CLEO.2011.6193820
Filename
6193820
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