Title :
Thermal expansion coefficients of obliquely deposited LaF3 thin films
Author :
Jaing, Cheng-Chung ; Liu, Ming-Chung ; Feng, Ping-Chi ; Tang, Chien-Jen ; Liou, Yeuh-Yeong ; Liao, Bo-Huei ; Lee, Cheng-Chung
Author_Institution :
Dept. of Optoelectron. Syst. Eng., Minghsin Univ. of Sci. & Technol., Hsinchu, Taiwan
fDate :
Aug. 28 2011-Sept. 1 2011
Abstract :
Effects of columnar angles on the thermal expansion coefficients of LaF3 films were investigated. The LaF3 films with columnar micro structures were obliquely deposited on two types of glass substrates by means of resistive heating evaporation.
Keywords :
heat treatment; lanthanum compounds; optical films; optical materials; thermal expansion; thin films; vacuum deposition; LaF3; SiO2; columnar angles; columnar microstructures; glass substrates; obliquely deposited thin films; resistive heating evaporation; thermal expansion coefficients; Films; Glass; Heating; Substrates; Temperature measurement; Thermal expansion; Thermal stresses;
Conference_Titel :
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4577-1939-4
DOI :
10.1109/IQEC-CLEO.2011.6193820