DocumentCode
1987586
Title
Determination of length difference between two gauge blocks using a Michelson interferometer
Author
Wongsaroj, J. ; Ranusawud, M. ; Tianprateep, M.
Author_Institution
Nat. Inst. of Metrol. (Thailand), Pathumthani, Thailand
fYear
2011
fDate
Aug. 28 2011-Sept. 1 2011
Firstpage
1667
Lastpage
1669
Abstract
The length difference between two gauge block were measured by using Michelson interferometer with stabilized He-Ne laser at 633 nm. The phase-shifting method was employed in order to create four interferograms. All interferograms were acquired by CCD camera and sent to computer. Length difference of any two gauge blocks was determined from phase difference at the central position of gauge blocks. The measurement uncertainty of 20 nm was achieved.
Keywords
CCD image sensors; Michelson interferometers; gas lasers; gauges; helium; length measurement; measurement by laser beam; measurement standards; neon; phase shifting interferometry; CCD camera; He-Ne; Michelson interferometer; central position; gas laser; gauge blocks; length difference measurement; phase shifting method; wavelength 633 nm; Laser beams; Laser stability; Length measurement; Measurement by laser beam; Measurement uncertainty; Metrology; Phase shifting interferometry;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location
Sydney, NSW
Print_ISBN
978-1-4577-1939-4
Type
conf
DOI
10.1109/IQEC-CLEO.2011.6193831
Filename
6193831
Link To Document