Title :
Determination of length difference between two gauge blocks using a Michelson interferometer
Author :
Wongsaroj, J. ; Ranusawud, M. ; Tianprateep, M.
Author_Institution :
Nat. Inst. of Metrol. (Thailand), Pathumthani, Thailand
fDate :
Aug. 28 2011-Sept. 1 2011
Abstract :
The length difference between two gauge block were measured by using Michelson interferometer with stabilized He-Ne laser at 633 nm. The phase-shifting method was employed in order to create four interferograms. All interferograms were acquired by CCD camera and sent to computer. Length difference of any two gauge blocks was determined from phase difference at the central position of gauge blocks. The measurement uncertainty of 20 nm was achieved.
Keywords :
CCD image sensors; Michelson interferometers; gas lasers; gauges; helium; length measurement; measurement by laser beam; measurement standards; neon; phase shifting interferometry; CCD camera; He-Ne; Michelson interferometer; central position; gas laser; gauge blocks; length difference measurement; phase shifting method; wavelength 633 nm; Laser beams; Laser stability; Length measurement; Measurement by laser beam; Measurement uncertainty; Metrology; Phase shifting interferometry;
Conference_Titel :
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4577-1939-4
DOI :
10.1109/IQEC-CLEO.2011.6193831
