DocumentCode
1987761
Title
Calculations of parameters of BAW microwave composite resonators
Author
Dulmet, B. ; Mansfeld, G.D.
Author_Institution
Lab. de Chronometrie Electron. et Piezoelectr., Ecole Nat. Superieure de Mecanique et des Microtech., Besancon, France
Volume
2
fYear
1999
fDate
1999
Firstpage
750
Abstract
This paper uses available models to calculate the main operating parameters of BAW microwave composite resonators. Although such resonators can be used as devices for characterization of the underlying substrate, they can be expected to reach comparatively good performances if the substrate is made from very low loss material, such as YAG driven into vibration by a thin layer of ZnO or AlN. Operating on very high overtone is then quite feasible and solves many technological issues related to the achievement of actually thin membranes. Also, earlier investigations have shown a surprisingly efficient energy trapping on such resonators. The paper presents first investigations about microwave composite resonators operating around 3 GHz, using existing analytical models and shortly discusses issues attached to a two-dimensional FEM. The authors conclude that this technique should evolve to fully develop its expected benefits and must still be substituted by analytical calculations to allow for accurate calculation of parameters in actual devices. Use of existing model for energy trapping analysis seems possible even for very high overtone numbers
Keywords
acoustic microwave devices; acoustic resonators; bulk acoustic wave devices; finite element analysis; 3 GHz; AlN; AlN layer; BAW microwave composite resonator; YAG; YAG substrate; YAl5O12; ZnO; ZnO layer; analytical model; energy trapping; membrane; two-dimensional FEM; Analytical models; Biomembranes; Electrodes; Electron traps; Equivalent circuits; Impedance; Microwave devices; Predictive models; Q factor; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location
Besancon
ISSN
1075-6787
Print_ISBN
0-7803-5400-1
Type
conf
DOI
10.1109/FREQ.1999.841413
Filename
841413
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