DocumentCode
1988033
Title
Batch fabrication of AT-cut crystal resonators up to 200 MHz
Author
Wüthrich, Christian ; Piazza, Silvio Dalla ; Rüedi, Urs ; Studer, Bruno
Author_Institution
Asulab. Rue des Sors 3, Marin, Switzerland
Volume
2
fYear
1999
fDate
1999
Firstpage
807
Abstract
AT-cut High Frequency Fundamental quartz resonators have been fabricated up to 200 MHz. Specific problems relating to this range of frequency like the fabrication process or the design of the electrodes are presented. Finished devices have a resistance lower than 20 Ohms, exhibit only few weak spurious modes and are stable during an accelerated ageing measurement
Keywords
batch processing (industrial); crystal resonators; quartz; 20 ohm; 200 MHz; AT-cut quartz crystal resonator; SiO2; accelerated ageing; batch fabrication; electrical resistance; electrode design; high frequency fundamental mode; spurious modes; Accelerated aging; Boundary conditions; Cutoff frequency; Electrodes; Fabrication; Partial differential equations; Process design; Q factor; Resonance; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location
Besancon
ISSN
1075-6787
Print_ISBN
0-7803-5400-1
Type
conf
DOI
10.1109/FREQ.1999.841428
Filename
841428
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