DocumentCode
1988152
Title
Modern state and perspectives of bulk acoustic wave composite resonators
Author
Mansfeld, G.D.
Author_Institution
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Volume
2
fYear
1999
fDate
1999
Firstpage
843
Abstract
The review of the modern state and the perspectives of bulk acoustic wave composite resonators is presented. Special attention is paid to the following topics: what composite resonators are, modern composite resonators including multifrequency resonators, the thin-film resonators with and without acoustic isolation from the substrate. A particular review of the microwave bulk acoustic spectroscopy of the materials - the measurements of attenuation and elastic coefficients is presented
Keywords
acoustic microwave devices; acoustic resonators; bulk acoustic wave devices; acoustic isolation; attenuation; bulk acoustic wave composite resonator; elastic coefficient; microwave bulk acoustic spectroscopy; multifrequency resonator; thin film resonator; Acoustic devices; Acoustic materials; Acoustic waves; Electrodes; Frequency; Impedance; Modems; Resonance; Substrates; Thin films;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location
Besancon
ISSN
1075-6787
Print_ISBN
0-7803-5400-1
Type
conf
DOI
10.1109/FREQ.1999.841436
Filename
841436
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