DocumentCode
1988168
Title
Some applications of a stereographic analysis of etching shapes for structures micromachined in singly and doubly rotated quartz plates
Author
Tellier, C.R. ; Leblois, T.G.
Author_Institution
Lab. de Chronometrie, Electron. et Piezoelectr., Ecole Nat. Superieure de Mecanique et des Microtech., Besancon, France
Volume
2
fYear
1999
fDate
1999
Firstpage
847
Abstract
A stereographic analysis of 3D etching shapes is used to recognize rhombohedral faces limiting micromachined structures. Adjustment of the database is performed to generate for these faces extrema in the dissolution slowness. Theoretical shapes for microstructures derived from this new database am found to be in agreement with experiments
Keywords
etching; micromachining; quartz; 3D etching shape; SiO2; database; dissolution; doubly rotated quartz plate; micromachining; microstructure; rhombohedral face; singly rotated quartz plate; stereographic analysis; Anisotropic magnetoresistance; Biomembranes; Chemicals; Crystals; Databases; Etching; Face recognition; Kinematics; Microstructure; Shape;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency and Time Forum, 1999 and the IEEE International Frequency Control Symposium, 1999., Proceedings of the 1999 Joint Meeting of the European
Conference_Location
Besancon
ISSN
1075-6787
Print_ISBN
0-7803-5400-1
Type
conf
DOI
10.1109/FREQ.1999.841437
Filename
841437
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