Title :
A New Millimeter-Wave Fixture Deembedding Method Based on Generalized Cascade Network Model
Author :
Loo, Xi Sung ; Yeo, Kiat Seng ; Chew, Kok Wai Johnny ; Chan, Lye Hock Kelvin ; Ong, Shih Ni ; Do, M.A. ; Boon, Chirn Chye
Author_Institution :
GLOBALFOUNDRIES Singapore Pte. Ltd., Singapore, Singapore
Abstract :
In this letter, a universal cascade-based deembedding technique was presented for on-wafer characterization of the RF CMOS device. As compared with existing deembedding approaches, it is developed based on unique combinations of two THRU structures that enable efficient deembedding of fixture parasitics without any inaccurate lumped approximation or requirement of known standards. The proposed deembedding technique is validated on 0.13- μm CMOS devices and has been proven to be more accurate than existing lumped and cascade-based deembedding techniques. As a result, it gives deeper physical prediction on transistor gate capacitances and transconductance. Therefore, it is highly suitable to be applied for device characterization at millimeter-wave frequencies.
Keywords :
CMOS integrated circuits; integrated circuit layout; radiofrequency integrated circuits; RF CMOS device; THRU structures; cascade-based deembedding techniques; fixture parasitics; generalized cascade network model; lumped approximation; millimeter-wave fixture deembedding method; millimeter-wave frequencies; on-wafer characterization; transconductance; transistor gate capacitances; universal cascade-based deembedding technique; CMOS integrated circuits; CMOS technology; Couplings; Metals; Millimeter wave transistors; Layout; millimeter-wave field-effect transistors; scattering matrices;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2012.2237157
