Piezoelectric hydrogen sensor on the base of WO3-Pd films

Questions of hydrogen piezoelectric sensor fabrication are considered in this work. The method of metallic palladium precipitation, based on colour centres transformation is proposed. The palladium film possessed a developed surface and served as a basis for the hydrogen sensor of piezoelectric type on the base of the thin-film structure WO ₃/Pd-quartz crystal. The influence of sensor initial loading with sensitive covering on its steady-state characteristics is explored. Hydrogen concentration limits of sensor use are determined. The obtained results confirm the efficiency of the proposed method of palladium precipitation when making the sensitive layer of hydrogen sensor