• DocumentCode
    1989719
  • Title

    MEMS with Σ - Δ type of feedback loop control as an iterative map

  • Author

    Pladys, Mathieu ; Blokhina, Elena

  • Author_Institution
    Dept. de Genie Electr. et Inf., Inst. Nat. des Sci. Appl. de Toulouse, Toulouse, France
  • fYear
    2011
  • fDate
    15-18 May 2011
  • Firstpage
    977
  • Lastpage
    980
  • Abstract
    In this work, we consider a system that consists of a microresonator and a Σ Δ type feedback loop control which is typically a part of inertial sensors. We describe this architecture as a dynamical system (an iterative difference equation) in the time domain in order to study possible periodic solutions in the output.
  • Keywords
    difference equations; iterative methods; microcavities; micromechanical resonators; microsensors; sigma-delta modulation; time-domain analysis; ΣΔ type feedback loop control; MEMS; dynamical system; inertial sensor; iterative difference equation; iterative map; microresonator; time domain analysis; Accelerometers; Equations; Force; Micromechanical devices; Oscillators; Sensors; Topology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems (ISCAS), 2011 IEEE International Symposium on
  • Conference_Location
    Rio de Janeiro
  • ISSN
    0271-4302
  • Print_ISBN
    978-1-4244-9473-6
  • Electronic_ISBN
    0271-4302
  • Type

    conf

  • DOI
    10.1109/ISCAS.2011.5937731
  • Filename
    5937731
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1989719