A novel optical read-out technology for large arrays of micromachined cantilever sensors

A novel, optical approach to the interrogation of MEMS cantilever sensors is discussed. We investigate the effects of placing a diffraction grating in a Si waveguide below a cantilever arm, to create a resonant cavity which will create interference on an optical signal through the waveguide. We look at FDTD simulations of the optical power transmitted through this device as the cantilever´s height changes in relation to the diffraction grating. We discuss the use of this interrogation technique on micro-cantilever-based sensors operating in both the dynamic and static mode.