DocumentCode :
1990333
Title :
Organic thin film transistors with printed gate electrodes
Author :
Zschieschang, Ute ; Klauk, Hagen ; Halik, Marcus ; Schmid, Gunter ; Radlik, Wolfgang ; Weber, Werner
Author_Institution :
Polymer Mater. & Technol., Infineon Technol., Erlangen, Germany
fYear :
2002
fDate :
2002
Firstpage :
191
Lastpage :
195
Abstract :
We have fabricated pentacene thin film transistors on flexible polymeric substrates with gate electrodes prepared using a combination of microcontact printing and selective electroless plating of nickel. These transistors also employ a spin-coated polymer gate dielectric layer patterned by photolithography and dry etching and have a carrier mobility of 0.03 cm2/V-s, comparable to pentacene transistors with vacuum-deposited gate electrodes. For comparison, we have also fabricated pentacene devices on silicon substrates and obtained carrier mobility as large as 1.3 cm2/V-s, demonstrating the potential of pentacene thin film transistors for low-cost electronic applications.
Keywords :
carrier mobility; electroless deposition; insulated gate field effect transistors; nickel; organic semiconductors; photolithography; printing; semiconductor device metallisation; semiconductor technology; spin coating; sputter etching; thin film transistors; Ni; TFT fabrication process; carrier mobility; dry etching; flexible polymeric substrates; low-cost electronic applications; microcontact printing; organic TFTs; organic thin film transistors; pentacene TFTs; photolithography; printed gate electrodes; selective electroless Ni plating; spin-coated polymer gate dielectric layer; Dielectric substrates; Dielectric thin films; Dry etching; Electrodes; Nickel; Organic thin film transistors; Pentacene; Polymer films; Soft lithography; Thin film transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Polymers and Adhesives in Microelectronics and Photonics, 2002. POLYTRONIC 2002. 2nd International IEEE Conference on
Print_ISBN :
0-7803-7567-X
Type :
conf
DOI :
10.1109/POLYTR.2002.1020209
Filename :
1020209
Link To Document :
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