DocumentCode
1990483
Title
Aperture area metrology using confocal laser beam scanning technique
Author
Roy, M. ; Manson, P. ; Thorvaldson, E.D. ; Atkinson, E.G. ; Ballico, M.J.
Author_Institution
Nat. Meas. Inst., Lindfield, NSW, Australia
fYear
2011
fDate
Aug. 28 2011-Sept. 1 2011
Firstpage
1664
Lastpage
1666
Abstract
In precision optical radiometric and photometric measurements, one of the limiting factors is an accurate knowledge of the area of a beam limiting aperture. The world´s most accurate radiometric measurements are currently realized with a relative standard uncertainty of order 10-4. To achieve this level of accuracy it is essential to measure apertures with the same relative standard uncertainty. We present a computer controlled absolute aperture-area measurement system based on a confocal laser beam scanning technique. In this system, a precision aperture is scanned utilizing a tightly focused beam and precision translation stages.
Keywords
laser beams; measurement by laser beam; photometry; radiometry; aperture area metrology; beam limiting aperture; confocal laser beam scanning technique; photometric measurements; precision optical measurements; radiometric measurements; Apertures; Area measurement; Laser beams; Measurement by laser beam; Optical variables measurement; Radiometry; Uncertainty;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location
Sydney, NSW
Print_ISBN
978-1-4577-1939-4
Type
conf
DOI
10.1109/IQEC-CLEO.2011.6193962
Filename
6193962
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