Title :
Direct laser writing with a slit-beam dynamically controlled with a phase spatial light modulator
Author :
Cumming, Benjamin P. ; Gu, Min
Author_Institution :
Centre for Micro-Photonics & CUDOS, Swinburne Univ. of Technol., Hawthorn, VIC, Australia
fDate :
Aug. 28 2011-Sept. 1 2011
Abstract :
We present the use of a spatial light modulator operating as a phase modulator to create a dynamic slit at the pupil plane of the objective. The dynamic updating of the slit size, shape, position and angle allows for the aspect ratio improving slit method to be applied to more complex structures beyond straight waveguides and channels and to higher numerical aperture objectives that possess lateral asymmetry due to depolarization effects.
Keywords :
laser beam machining; optical fabrication; optical waveguides; phase modulation; spatial light modulators; direct laser writing; dynamic slit; phase modulator; pupil plane; slit beam; spatial light modulator; Apertures; Laser beams; Optical device fabrication; Phase modulation; Shape; Waveguide lasers;
Conference_Titel :
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4577-1939-4
DOI :
10.1109/IQEC-CLEO.2011.6193977
