Title :
Modal analyses of loaded waveguides for microwave diagnostics of semiconductors
Author :
Hindy, Moataza A. ; Mitkees, A.A. ; Sohly, A. El
Author_Institution :
Nat. Res. Centre, Cairo, Egypt
Abstract :
The effect of semiconducting sample fitting dimensions on the waveguide measured parameters, and consequently on semiconductor diagnostics, is studied. Modal charts are constructed to show the influence of tolerance fitting (gaps between the sample and guide walls) on the propagation constant. Semiconductor losses are considered. The effect of sample dimensions on the reflection coefficients is analyzed. A diagnostic example is solved to show how the gap size has a great effect on the accuracy of the semiconductor parameters
Keywords :
dielectric-loaded waveguides; electromagnetic wave reflection; losses; microwave measurement; semiconductors; waveguide theory; gap size; loaded waveguides; losses; microwave diagnostics; modal analysis; propagation constant; reflection coefficients; sample fitting dimensions; semiconductors; tolerance fitting; waveguide measured parameters; Circuits; Equations; Loaded waveguides; Propagation constant; Propagation losses; Rectangular waveguides; Reflection; Semiconductor waveguides; Silicon compounds; Waveguide components;
Conference_Titel :
Circuits and Systems, 1989., Proceedings of the 32nd Midwest Symposium on
Conference_Location :
Champaign, IL
DOI :
10.1109/MWSCAS.1989.102032
